Total reflection x-ray fluorescence spectrometer and estimation method

ABSTRACT

Provided are a total reflection X-ray fluorescence spectrometer and an estimation method which are capable of easily and quickly estimating whether contamination exists on a substrate through use of a machine learning device. The total reflection X-ray fluorescence spectrometer includes: a spectrum acquisition unit configured to acquire a spectrum; and a learning unit which includes an estimation unit configured to generate estimation data on an element contained in contamination on a surface of a substrate in response to input of the spectrum, and for which learning by the estimation unit has been executed based on teacher data including the spectrum for learning and data on the element contained in the contamination on the surface of the substrate which has been used to acquire the spectrum for learning and the estimation data generated when the spectrum for learning is input to the estimation unit.

TECHNICAL FIELD

The present invention relates to a total reflection X-ray fluorescencespectrometer and an estimation method.

BACKGROUND ART

Hitherto, there has been known a method of analyzing a spectrum throughuse of a machine learning device. For example, in Patent Literature 1,there is disclosed a spectral analysis device including a convolutionalneural network which acquires an optical spectrum having absorbanceassigned to a vertical axis and a wavenumber assigned to a horizontalaxis through use of an infrared spectroscope, and then analyzes acompound such as a foreign substance contained in a target sample basedon the optical spectrum.

Moreover, in Patent Literature 2, there are disclosed such a point thata peak detection processor is caused to learn to acquire a peak heightand a peak area value included in a spectrum, and a waveform analyzerincluding this peak detection processor.

Further, in Patent Literature 3, there is disclosed an informationprocessing apparatus which inputs spectrum information on a samplecontaining a test substance and impurities to a learning model, tothereby estimate quantitative information on the test substance.

CITATION LIST Patent Literature

-   [PTL 1] WO 2019/039313 A1-   [PTL 2] WO 2019/092836 A1-   [PTL 3] JP 2020-101524 A

SUMMARY OF INVENTION Technical Problem

Incidentally, there is known an X-ray fluorescence spectrometer as adevice for analyzing elements contained in a sample. The X-rayfluorescence spectrometer irradiates the sample with primary X-rays, andacquires a spectrum representing a relationship between intensities, andenergies, of emitted fluorescent X-rays. Elements contained in thesample are analyzed through use of peak fitting for each peak includedin this spectrum.

For example, the X-ray fluorescence spectrometer is used to inspectwhether or not contamination exists on a surface of a substrate in aproduction line for semiconductors. In particular, a total reflectionX-ray fluorescence spectrometer having high detection sensitivity isused in order to determine whether or not minute contamination exists.

However, even when the total reflection X-ray fluorescence spectrometeris used, when an adhesion amount of the contamination is extremelysmall, a ratio (SN ratio) of the peak and the noise included in thespectrum is small, and the above-mentioned determination may bedifficult. In particular, when a measurement time is reduced in order toexecute many inspections in the same time, the SN ratio of the spectrumdecreases, and highly accurate determination cannot be made.

The present invention has been made in view of the above-mentionedproblem, and has an object to provide a total reflection X-rayfluorescence spectrometer and an estimation method which are capable ofeasily and quickly determining whether or not contamination exists on asubstrate through use of a machine learning device.

Solution to Problem

According to claim 1, there is provided a total reflection X-rayfluorescence spectrometer including: a spectrum acquisition unitconfigured to acquire a spectrum representing a relationship betweenintensities, and energies, of emitted fluorescent X-rays by irradiatinga surface of a substrate with primary X-rays at a total reflectioncritical angle or less; and a learning unit which includes an estimationunit configured to generate estimation data on an element contained incontamination on the surface of the substrate in response to input ofthe spectrum, and for which learning by the estimation unit has beenexecuted based on teacher data including the spectrum for learning, anddata on the element contained in the contamination on the surface of thesubstrate which has been used to acquire the spectrum for learning, withand the estimation data generated when the spectrum for learning isinput to the estimation unit.

According to the total reflection X-ray fluorescence spectrometer ofclaim 2, the total reflection X-ray fluorescence spectrometer of claim 1further includes an analysis unit configured to analyze the elementcontained in the contamination based on the spectrum, through use of afundamental parameter method or a calibration curve method, and the dataon the element contained in the contamination on the surface of thesubstrate, which is included in the teacher data, is an analysis resultobtained by the analysis unit.

According to the total reflection X-ray fluorescence spectrometer ofclaim 3, in the total reflection X-ray fluorescence spectrometer ofclaim 1 or 2, the estimation data is data indicating whether the elementcontained in the contamination exists.

According to the total reflection X-ray fluorescence spectrometer ofclaim 4, in the total reflection X-ray fluorescence spectrometer ofclaim 1 or 2, the estimation data is data representing a quantitativevalue of the element contained in the contamination.

According to the total reflection X-ray fluorescence spectrometer ofclaim 5, in the total reflection X-ray fluorescence spectrometer of anyone of claims 1 to 4, the substrate is a silicon substrate, and theelement contained in the contamination is a plurality of elementsdetermined in advance.

According to claim 6, there is provided an estimation method including:a spectrum-for-learning acquisition step of acquiring a spectrum forlearning representing a relationship between intensities, and energies,of emitted fluorescent X-rays by irradiating a surface of a substratewith primary X-rays at a total reflection critical angle or less; alearning step of executing learning for an estimation unit based onteacher data including the spectrum for learning and data on an elementcontained in contamination on the surface of the substrate which hasbeen used to acquire the spectrum for learning, and estimation datagenerated when the spectrum for learning is input to the estimationunit; a spectrum-for-analysis acquisition step of acquiring a spectrumfor analysis representing a relationship between intensities, andenergies, of emitted fluorescent X-rays by irradiating a surface of asubstrate for which whether the element contained in the contaminationexists on the surface is unknown with primary X-rays at a totalreflection critical angle or less; and an estimation data generationstep of generating, using the estimation unit, the estimation data inresponse to input of the spectrum for analysis.

According to the estimation method of claim 7, in the estimation methodof claim 6, the spectrum-for-learning acquisition step includesacquiring a first spectrum for learning and a second spectrum forlearning, the teacher data in the learning step includes an analysisresult of the element contained in the contamination based on the firstspectrum for learning and the second spectrum for learning through useof a fundamental parameter method or a calibration curve method, and atime for acquiring the first spectrum for learning is shorter than atime for acquiring the second spectrum for learning.

According to the estimation method of claim 8, in the estimation methodof claim 6 or 7, a plurality of items of the teacher data are acquiredbased on the same measurement point of one substrate.

Advantageous Effects of Invention

According to the inventions of claim 1 to claim 8, it is possible toeasily and quickly determine whether or not the contamination exists onthe substrate.

According to the invention of claim 8, it is possible to easily collectthe teacher data required for the machine learning.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a diagram for schematically illustrating a hardwareconfiguration of a total reflection X-ray fluorescence spectrometer.

FIG. 2 is a block diagram for schematically illustrating a functionalconfiguration of the total reflection X-ray fluorescence spectrometer.

FIG. 3 is a table for showing an example of input data.

FIG. 4 is a diagram for illustrating processing executed by a learningunit.

FIG. 5 are tables for showing examples of output data.

FIG. 6 is a flowchart for illustrating an example of a method ofgenerating teacher data.

FIG. 7 is a flowchart for illustrating another example of the method ofgenerating teacher data.

FIG. 8 is a flowchart for illustrating still another example of themethod of generating teacher data.

FIG. 9 is a flowchart for illustrating a method of causing an estimationunit included in the learning unit to learn.

FIG. 10 is a flowchart for illustrating an estimation method.

FIG. 11 is a diagram for illustrating a machine learning model used inan Example.

FIG. 12 is a graph for showing transitions of mean squared errors as thelearning progresses.

FIG. 13 shows graphs for showing a relationship between estimatedquantitative values and true quantitative values.

FIG. 14 shows graphs and a table for showing a comparison result betweenthe related art and the present invention.

FIG. 15 are graphs for showing determination of whether or not a peakexists.

DESCRIPTION OF EMBODIMENTS

Now, a preferred embodiment for carrying out the present invention(hereinafter referred to as “embodiment”) will be described. FIG. 1 is adiagram for illustrating an example of a schematic hardwareconfiguration of a total reflection X-ray fluorescence spectrometer 100.

As illustrated in FIG. 1 , the total reflection X-ray fluorescencespectrometer 100 acquires a spectrum representing a relationship betweenintensities, and energies, of emitted fluorescent X-rays by irradiatinga surface of a substrate with primary X-rays at a total reflectioncritical angle or less. Specifically, for example, the total reflectionX-ray fluorescence spectrometer 100 includes a sample stage 104, anX-ray source 106, a monochromator 108, and a detection unit 110.

On the sample stage 104, a sample 116 to be analyzed is placed.Description will now be given of a case in which the sample 116 is asubstrate. The substrate is a silicon substrate used to produce, forexample, semiconductor products. Elements contained in contamination area plurality of elements determined in advance. For example, the elementscontained in the contamination are elements such as Si, P, S, Cl, Ar, K,Ca, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, and Zn, which are likely to bemixed in a semiconductor plant which produces or processes the siliconsubstrates. The elements contained in the contamination may be otherelements as long as the elements are set in advance when learningdescribed later is executed. The substrate may be a substrate formed ofelements other than silicon, such as GaAs, GaN, SiC, and quartz.

The X-ray source 106 emits primary X-rays. The primary X-rays emitted bythe X-ray source 106 have various energies.

The monochromator 108 extracts primary X-rays having a specific energyfrom the primary X-rays having various energies emitted from the X-raysource 106. The monochromator 108 is arranged between the X-ray source106 and the substrate. The surface of the substrate is irradiated withthe primary X-rays having the specific energy at an incident angle equalto or smaller than a degrees. The a degrees is the total reflectioncritical angle. From the substrate irradiated with the primary X-rays,fluorescent X-rays are emitted.

The detection unit 110 includes a detector and a counter. The detectoris, for example, a semiconductor detector such as a silicon driftdetector (SDD). The detector measures intensities of the florescentX-rays (florescent X-rays and scattered rays), and outputs a pulsesignal having pulse heights corresponding to energies of the measuredflorescent X-rays.

The counter counts the pulse signal output from the detector inaccordance with the pulse heights. Specifically, for example, thecounter is a multi-channel analyzer, and counts the output pulse signalof the detector for each channel corresponding to the energy, andoutputs the result as the intensities of the fluorescent X-rays. Thedetection unit 110 acquires output of the counter as a spectrum.

Operations of the sample stage 104, the X-ray source 106, themonochromator 108, and the detection unit 110 are controlled by acontrol unit (not shown). Specifically, the control unit is, forexample, a personal computer. The control unit transmits and receivesinstruction commands to and from each of the components, to therebycontrol the operations of the sample stage 104, the X-ray source 106,the detection unit 110, and the monochromator 108.

Description will now be given of a functional configuration of the totalreflection X-ray fluorescence spectrometer 100. FIG. 2 is a blockdiagram for schematically illustrating the functional configuration ofthe total reflection X-ray fluorescence spectrometer 100. As illustratedin FIG. 2 , the total reflection X-ray fluorescence spectrometer 100includes a spectrum-for-learning acquisition unit 202, aspectrum-for-analysis acquisition unit 204, an analysis unit 206, and alearning unit 208.

The spectrum-for-learning acquisition unit 202 acquires a spectrum forlearning. The spectrum for learning is a spectrum for learning whichrepresents a relationship between the intensities, and the energies, ofthe fluorescent X-rays emitted when the surface of the substrate isirradiated with the primary X-rays at the total reflection criticalangle or less, and is used for learning for the learning unit 208.

Specifically, for example, the spectrum-for-learning acquisition unit202 acquires a spectrum for learning having a one-dimensional datastructure representing a relationship between the energies and theintensities of the fluorescent X-rays, which is shown in FIG. 3 . Thedata of FIG. 3 corresponds to output of Channel 1 to Channel 2,000 ofthe counter, in the order from the top to the bottom. As will bedescribed later, the spectrum for learning may be measurement dataacquired by the detection unit 110 or theoretical data acquired throughcalculation.

The spectrum-for-analysis acquisition unit 204 acquires a spectrum foranalysis. The spectrum for analysis is a spectrum for analysisrepresenting a relationship between the intensities and the energies ofthe emitted fluorescent X-rays, and is used to analyze the substrate.Specifically, for example, the spectrum-for-analysis acquisition unit204 acquires a spectrum for analysis having a one-dimensional datastructure representing the relationship between the energies and theintensities of the fluorescent X-rays, which is shown in FIG. 3 , in thesame manner as in the spectrum-for-learning acquisition unit 202. Thatis, the spectrum for analysis is measurement data acquired by thedetection unit 110.

The analysis unit 206 analyzes the elements contained in thecontamination based on the spectrum through use of a fundamentalparameter method or a calibration curve method. Specifically, forexample, the analysis unit 206 executes fitting for each of the peaksincluded in the spectrum acquired by the detection unit 110, to therebyacquire an approximation function. The approximation function for eachpeak is represented by a theoretical intensity calculated through use ofquantitative values of each element, physical constants, deviceconstants, and the like, and an appropriate function such as a Gaussianfunction representing a shape of the peak. The analysis unit 206 appliesthe peak fitting to the spectrum, to thereby analyze whether or notelements contained in the contamination exist.

Moreover, the analysis unit 206 calculates a peak intensity based on aspectrum within a set energy range, and executes quantitative analysisfor the elements based on the calculated peak intensity.

The learning unit 208 includes an estimation unit 210 and a parameterstorage unit 212. The estimation unit 210 generates estimation data onthe elements contained in the contamination on the surface of thesubstrate in response to the input of the spectrum. The estimation datais data indicating whether or not the elements contained in thecontamination exist. Moreover, the estimation data may be dataindicating quantitative values of the elements contained in thecontamination.

Further, learning has been executed for the estimation unit 210 based onteacher data, including the spectrum for learning, and data on theelements contained in the contamination on the surface of the substratewhich has been used to acquire the spectrum for learning, and estimationdata generated when the spectrum for learning is input to the estimationunit.

Specifically, for example, as illustrated in FIG. 4 , the estimationunit 210 is a machine learning model implemented by convolutional neuralnetworks (CNNs). The estimation unit 210 may be a machine learning modelsimply implemented by neural networks (NNs). The estimation unit 210receives input of data which has the one-dimensional data structure andrepresents the relationship between the energies and the intensities ofthe fluorescent X-rays as shown in FIG. 3 . In FIG. 4 , this data isrepresented as a spectrum.

After that, the estimation unit 210 generates the estimation data inresponse to the input of the spectrum. In the example of FIG. 5(a), theestimation data is data which indicates each element contained in thecontamination and whether or not each element exists, and has aone-dimensional data structure. In the data indicating whether or notthe element contained in the contamination exists, for example,information indicating that the element contained in the contaminationexists is represented by 1, and information indicating that the elementcontained in the contamination does not exist is represented by 0.

In the example of FIG. 5(b), the estimation data is data which indicatesquantitative values of the elements contained in the contamination, andhas a one-dimensional data structure. The data which indicates thequantitative values of the elements contained in the contamination is,for example, information indicating the intensity of each elementcontained in the contamination. An adhesion amount of each element canbe calculated based on the intensity of each element, and hence theintensity of each element of FIG. 5(b) corresponds to the quantitativevalue.

With reference to flowcharts of FIG. 6 to FIG. 9 , description will nowbe given of the learning executed by the learning unit 208. FIG. 6 is aflowchart for illustrating an example of a method of generating teacherdata.

First, a substrate is placed on the sample stage 104 (Step S602).Specifically, a substrate for which whether or not the contaminationadheres to a predetermined position of a substrate surface is known isplaced on the sample stage 104. In this case, the substrate is placedsuch that the predetermined position on the substrate surface is aposition irradiated with the primary X-rays. Moreover, the quantitativevalues of the elements contained in the contamination may be known.

After that, the spectrum-for-learning acquisition unit 202 acquires thespectrum for learning (Step S604). Specifically, the surface of thesubstrate is irradiated with the primary X-rays at the total reflectioncritical angle or less, and the spectrum-for-learning acquisition unit202 acquires the spectrum for learning representing the relationshipbetween the intensities of the emitted fluorescent X-rays and theenergies. In this case, the predetermined position on the substratesurface is irradiated with the primary X-rays for, for example, 5seconds.

After that, the teacher data is generated (Step S606). Specifically, thedata in Step S602 for which whether or not the elements contained in thecontamination exist is known, and the spectrum for learning acquired inStep S604, are combined to generate one item of teacher data. When thequantitative values of the elements contained in the contamination areknown in Step S602, those quantitative values and the spectrum forlearning acquired in Step S604 may be combined to generate one item ofteacher data.

Step S602 to Step S606 are repeated a plurality of times until arequired number of items of teacher data for the learning are collected.A plurality of items of the teacher data may be acquired based on thesame measurement point of one substrate. That is, while the processingstep of Step S602 is executed one time, the processing step of Step S604may be executed a plurality of times. In this case, a plurality of itemsof teacher data are generated by combining the data on the knownelements contained in the contamination in Step S602 with each of theplurality of spectra acquired in Step S604.

FIG. 7 is a flowchart for illustrating another example of the method ofgenerating teacher data. First, a substrate is placed on the samplestage 104 (Step S702). Specifically, a substrate for which whether ornot the elements contained in the contamination exist at a predeterminedposition of a substrate surface is not known is placed on the samplestage 104. In this case, the substrate is placed such that thepredetermined position on the substrate surface is a position irradiatedwith the primary X-rays. Moreover, the quantitative values of theelements contained in the contamination are also not known.

After that, the spectrum-for-learning acquisition unit 202 acquires afirst spectrum for learning (Step S704). Specifically, the X-ray source106 irradiates, through the monochromator 108, the surface of thesubstrate with the primary X-rays at the total reflection critical angleor less, and the spectrum-for-learning acquisition unit 202 acquires aspectrum representing the relationship between the intensities and theenergies of the emitted fluorescent X-rays. In this case, thepredetermined position on the substrate surface is irradiated with theprimary X-rays for, for example, 5 seconds.

After that, the spectrum-for-learning acquisition unit 202 acquires asecond spectrum for learning (Step S706). Specifically, the X-ray source106 irradiates, through the monochromator 108, the surface of thesubstrate with the primary X-rays at the total reflection critical angleor less, and the spectrum-for-learning acquisition unit 202 acquires aspectrum representing the relationship between the intensities and theenergies of the emitted fluorescent X-rays. In this case, a time foracquiring the first spectrum for learning is shorter than a time foracquiring the second spectrum for learning. For example, in Step S706,the predetermined position on the substrate surface is irradiated withthe primary X-rays for, for example, 60 seconds.

After that, the analysis unit 206 carries out the analysis (Step S708).Specifically, the analysis unit 206 uses the second spectrum forlearning acquired in Step S706 to analyze whether or not the elementscontained in the contamination exist through use of the fundamentalparameter method or the calibration curve method. Moreover, the analysisunit 206 may also analyze, in addition to analyzing whether or not theelements contained in the contamination exist, the quantitative valuesof the elements contained in the contamination.

After that, the teacher data is generated (Step S710). Specifically, theresult of the analysis in Step S708 and the spectrum for learningacquired in Step S704 are combined to generate one item of teacher data.That is, the teacher data includes the first spectrum for learning andthe analysis result of the elements contained in the contaminationthrough use of the fundamental parameter method or the calibration curvemethod based on the second spectrum for learning. The data contained inthe teacher data and indicating whether or not the elements exist is theanalysis result obtained by the analysis unit 206. When the quantitativevalues of the elements contained in the contamination are analyzed inStep S708, those quantitative values and the first spectrum for learningacquired in Step S704 may be combined to generate one item of teacherdata.

In the same manner as described above, the processing steps of Step S702to Step S710 are repeated a plurality of times until the required numberof items of teacher data for the learning are collected. Moreover, theprocessing step of Step S704 may be executed a plurality of times forone set of the processing steps of Step S706 and Step S708. In thiscase, a plurality of items of the teacher data are generated bycombining the analysis result in Step S708 with each of the plurality offirst spectra for learning acquired in Step S704.

In the method of FIG. 7 , the time for acquiring the first spectrum forlearning is shorter than the time for acquiring the second spectrum forlearning. Thus, the result of the analysis of the second spectrum forlearning is higher in accuracy of the analysis than the result of theanalysis of the first spectrum for learning. Accordingly, the teacherdata is generated by combining the analysis result having the higheraccuracy than the analysis result of the first spectrum for learning,with the first spectrum for learning acquired in the shorter time.

The predetermined position in the description of FIG. 6 and FIG. 7 is ameasurement position. The predetermined position may be any measurementposition which is a certain position defined in advance on thesubstrate, and is, for example, the center of the substrate.

FIG. 8 is a flowchart for illustrating still another example of themethod of generating teacher data. First, information indicating whetheror not predetermined contamination exists is generated (Step S802).Specifically, for example, the control unit uses a random number togenerate data indicating whether or not each element which is likely toadhere to the surface of the substrate exists. Moreover, the controlunit uses a random number to generate the quantitative value of eachelement in addition to the data indicating whether or not each elementexists.

After that, a spectrum for learning is generated (Step S804).Specifically, the control unit uses the quantitative value of eachelement generated in Step S802, physical constants, and deviceconstants, to calculate a theoretical intensity for each energy. In thiscase, the physical constants and the device constants are appropriatelyset in accordance with an environment in which the present invention isembodied. The spectrum-for-learning acquisition unit 202 acquires atheoretical profile obtained through this calculation as the spectrumfor learning. The calculation is executed through use of related art,such as the fundamental parameter method.

After that, the teacher data is generated (Step S806). Specifically, thedata generated in Step S802 and indicating whether or not the elementscontained in the contamination exist, and the spectrum for learninggenerated in Step S804, are combined to generate one item of teacherdata. In the same manner as described above, the processing steps ofStep S802 to Step S806 are repeated a plurality of times until therequired number of items of teacher data for the learning are collected.

Any one of the flowcharts of FIG. 6 to FIG. 8 may be used to generatethe teacher data, or two or three flowcharts thereof may be used togenerate the teacher data.

FIG. 9 is a flowchart for illustrating a method of executing thelearning for the estimation unit 210 included in the learning unit 208.It is assumed that the estimation unit 210 is a machine learning modelimplemented by the convolutional neural networks (CNNs). Moreover, aneural network model (hereinafter referred to as “first CNN”) whichoutputs the data indicating whether or not the elements contained in thecontamination exist and a neural network model (hereinafter referred toas “second CNN”) which outputs the quantitative values of the elementscontained in the contamination are individually built in advance. First,“i,” which is an internal variable, is set to 1 (Step S902).

After that, the teacher data is input to the estimation unit 210 (StepS904). Specifically, when “i” is 1, the spectrum for learning and thedata indicating whether or not the elements contained in thecontamination exist are input to the first CNN. As shown in FIG. 5(a),in the data indicating whether or not the elements contained in thecontamination exist, a case in which each of the elements contained inthe contamination exists is indicated by 1, and a case in which each ofthe elements does not exist is indicated by 0. When this spectrum forlearning is input, the first CNN outputs a probability of the existenceof each of the elements contained in the contamination as a numericalvalue of from 0 to 1.

Moreover, the spectrum for learning and the quantitative value of eachof the elements contained in the contamination of FIG. 5(b) are input tothe second CNN. When this spectrum for learning is input, the second CNNoutputs the quantitative value of each of the elements contained in thecontamination.

After that, mean squared errors are calculated (Step S906).Specifically, the learning unit 208 calculates a mean squared error ofdifferences each between the value representing the probability of theexistence of each of the elements contained in the contamination, whichis output by the estimation unit 210, and the data indicating whether ornot each of the elements exists, which is input in Step S904. Moreover,the learning unit 208 calculates a mean squared error of differencesbetween each quantitative value of each of the elements output by theestimation unit 210, and the quantitative value of each of the elementsinput in Step S904.

After that, parameters are updated (Step S908). Specifically, thelearning unit 208 uses back propagation to update the parameters of thefirst CNN and the second CNN such that the mean squared errors decrease.The parameters are internal constants of the first CNN and the secondCNN, and are values each used, for example, to weight each node. Theupdated parameters are stored in the parameter storage unit 212.

After that, whether or not “i” is 5,000 is determined (Step S910). Whena determination of “No” is made, “i” is incremented (Step S912), and theprocess returns to Step S906. In this case, the learning of the firstCNN and the second CNN is further executed, and the parameters areupdated again. Meanwhile, when a determination of “Yes” is made in StepS910, the learning is finished.

As described above, the learning is executed by repeating the update ofthe parameters. The case in which the update of the parameters isexecuted 5,000 times has been described with reference to FIG. 9 , butthe configuration is not limited to this example. For example, in StepS906, the learning may be finished when the mean squared errors fallbelow a predetermined value.

Moreover, the case in which the second CNN is caused to learn along withthe first CNN has been described, but when the quantitative analysis forthe elements is not executed, only the learning of the first CNN may beexecuted. Further, when whether or not the elements contained in thecontamination exist is determined based on a result of the quantitativeanalysis, only the learning of the second CNN may be executed.

Moreover, the case in which the estimation unit 210 is the machinelearning model in which the first CNN and the second CNN areindividually implemented has been described, but the machine learningmodel can be appropriately designed. For example, the estimation unit210 may be a machine learning model implemented by a singleconvolutional neural network which outputs the quantitative valuestogether with the data indicating whether or not the elements exist.

Description will now be given of a method of estimating whether or notthe elements contained in the contamination exist on a surface of asubstrate and the quantitative values of the elements through use of thelearned estimation unit 210. FIG. 10 is a flowchart for illustratingthis estimation method. It is assumed that a spectrum-for-learningacquisition step and a learning step have been completed by executingthe flowcharts of FIG. 6 to FIG. 9 .

First, the substrate is placed on the sample stage 104 (Step S1002).Specifically, a substrate for which whether or not the elementscontained in the contamination exist on the substrate surface is notknown is placed on the sample stage 104. This substrate is a target forwhich whether or not the elements contained in the contamination exist,and the quantitative values of the elements, are analyzed.

After that, “i”, which is the internal variable, is set to 1 (StepS1004).

Then, the sample stage 104 moves the substrate such that a position onthe substrate to be analyzed is a position corresponding to the internalvariable “i” (Step S1006). The position on the substrate to be analyzedis unique for each internal variable “i”.

After that, a spectrum for analysis is acquired (Step S1008).Specifically, the surface of the substrate is irradiated with theprimary X-rays at the total reflection critical angle or less, and thespectrum-for-analysis acquisition unit 204 acquires the spectrum for theanalysis representing the relationship between the intensities of theemitted fluorescent X-rays and the energies. In this case, the positionwhich is the position corresponding to the internal variable “i”, andthat is the position on the substrate to be analyzed, is irradiated withthe primary X-rays for 5 seconds.

After that, the estimation unit 210 generates the estimation data (StepS1010). Specifically, the estimation unit 210 generates the estimationdata indicating whether or not the elements contained in thecontamination exist on the surface of the substrate in response to theinput of the spectrum for analysis acquired in Step S1008. Moreover, theestimation unit 210 generates the estimation data indicating thequantitative values of the elements contained in the contamination inresponse to the input of the spectrum for analysis acquired in StepS1008.

After that, whether or not “i” is 50 is determined (Step S1012). When adetermination of “No” is made, “i” is incremented (Step S1014), and theprocess returns to Step S1006. In this case, a different position on thesubstrate is further irradiated with the primary X-rays, and thespectrum for analysis is acquired again. Meanwhile, when a determinationof “Yes” is made in Step S1012, the process proceeds to Step S1016.

When the items of estimation data at the 50 positions on the substratehave been generated (Yes in Step S1012), all the items of estimationdata are output (Step S1016). Specifically, an estimation resultindicating whether or not the elements contained in the contaminationexist, and the quantitative values of those elements at each position onthe surface of the substrate, is displayed on a display unit (notshown).

With the processing steps described above, through use of the estimationmethod of FIG. 10 , the spectrum for analysis can be acquired in a shorttime, and the learned estimation unit 210 can be used to make theestimation without parameter fitting and the like by the analysis unit206. Thus, it is possible to quickly and easily analyze whether or notthe elements contained in the contamination exist, and the quantitativevalues of the elements, if any, at a large number of positions on thesubstrate.

The case in which the intensities of the fluorescent X-rays are measuredat the 50 different positions on the substrate has been described withreference to FIG. 10 , but the number of measurement positions mayexceed or fall below the 50 positions.

Subsequently, an Example of the present invention will be described.

[Acquisition Conditions for Teacher Data]

The spectrum included in the teacher data is data actually measuredthrough use of TXRF-V310 and TXRF 3760, which are total reflection X-rayfluorescence spectrometers produced by Rigaku corporation (trademark). Atarget included in a tube of the X-ray source 106 used for themeasurement is a tungsten target. A tube voltage of the X-ray source 106is 35 kV, and a tube current thereof is 225 mA. The primary X-rays withwhich the substrate is irradiated is W-Lb X-rays monochromated by themonochromator 108.

The sample 116 is a plurality of 12-inch silicon substrates and aplurality of 8-inch silicon substrates. The number of measurement pointsis 297 on an entire surface of the 12-inch substrate (including an edgeof the substrate), and 113 points on an entire surface of the 8-inchsubstrate (including an edge of the substrate). There are threemeasurement times, specifically, 5 seconds, 10 seconds, and 30 seconds.The number of combinations between the spectrum and the quantitativevalues (that is, items of teacher data) is 8,896. The quantitativevalues which are the analysis result are the result of the analysis unitapplying the peak fitting to the spectrum acquired by the spectrumacquisition unit. 90 Percent of the 8,896 items of teacher data wereused for the learning, and the remaining 10 percent thereof were usedfor checking the learning result (test data).

[Machine Learning Model]

When the machine learning model was built, the TensorFlow was used as amachine learning library. As illustrated in FIG. 11 , the machinelearning model includes a one-dimensional convolutional layer, aflattening layer, four fully-connected layers each having 300 nodes, andan output layer. The estimation data output by the machine learningmodel includes quantitative values of 20 elements, which are P, S, Cl,Ar, K, Ca, Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, In, Sn, I, and Ba. Siis a main element forming the substrate, and is thus not included in theestimation data. In this Example, the machine learning model was builtsuch that the estimation data only including the quantitative values andnot including the data indicating whether or not the elements containedin the contamination exist is output. That is, the estimation unit 210is the machine learning model implemented by the above-mentioned secondCNN.

[Transition of Learning]

FIG. 12 is a graph for showing transitions of mean squared errors as thelearning progresses. In FIG. 12 , a vertical axis represents the meansquared error, and a horizontal axis represents the number of times theparameters were updated. Moreover, in FIG. 12 , a mean squared error ofthe data used for the learning (90% of the teacher data) and a meansquared error of the test data (10% of the teacher data) areindividually shown. As illustrated in FIG. 12 , as the learningprogresses, the mean square errors decrease. It is understood that,after learning was executed 5,000 time, the mean squared errors havesufficiently decreased.

[Result of Learning]

FIG. 13 shows graphs for showing a relationship between the estimatedquantitative values and true quantitative values. Specifically, each ofvertical axes of FIG. 13 represents the quantitative value (estimatedquantitative value) of each of the elements included in the estimationdata output by the estimation unit 210 when the spectrum included in thetest data was input to the estimation unit 210. Each of horizontal axesof FIG. 13 represents the quantitative value (true quantitative value)included in the test data. Moreover, FIG. 13 includes graphs of therelationship for the 20 elements. As shown in FIG. 13 , the relationshipbetween the estimated quantitative values and the true quantitativevalues is a linear relationship. That is, the estimated quantitativevalues and the true quantitative values closely match each other, andhence the estimation result can be considered to be correct.

[Measurement Conditions for Comparison]

In order to verify an accuracy of the measurement result through use ofthe above-mentioned learned machine learning model, the same position ofthe same substrate was irradiated with the primary X-rays for 5 secondsor 60 seconds, to thereby acquire two types of spectra. Those two typesof spectra were acquired at 117 positions of the same substrate. Ameasurement device was TXRF 3760, which is the total reflection X-rayfluorescence spectrometer produced by Rigaku corporation (trademark).The other measurement conditions are the same as the conditionsdescribed as the acquisition conditions for the teacher data.

[Comparison Result]

A spectrum on the left side of FIG. 14 is a spectrum acquired under theabove-mentioned measurement conditions, and has the measurement time of5 seconds. A spectrum on the right side of FIG. 14 is a spectrumacquired under the above-mentioned measurement conditions, and has themeasurement time of 60 seconds.

A table on a lower side of FIG. 14 is a table for showing a comparisonamong intensities of fluorescent X-rays, each of which is unique to eachelement. An uppermost row of the table represents intensities (analysisresults) each acquired by the analysis unit 206 applying the peakfitting to the spectrum having the measurement time of 5 seconds. Acenter row of the table represents intensities (estimation results) eachincluded in the estimation data output by the learned estimation unit210 in response to the input of the spectrum having the measurement timeof 5 seconds. A lowermost row of the table represents intensities(analysis results) each acquired by the analysis unit 206 applying thepeak fitting to the spectrum having the measurement time of 60 seconds.It is hereinafter assumed that the intensities acquired by the analysisunit 206 applying the peak fitting to the spectrum having themeasurement time of 60 seconds are true values.

In the analysis result based on the spectrum having the measurement timeof 5 seconds, Ca, Ti, Fe, and Cu are not detected. Meanwhile, in theestimation result based on the spectrum having the measurement time of 5seconds, Ca, Ti, Fe, and Cu are detected. Further, in the analysisresult based on the spectrum having the measurement time of 60 seconds,Ca, Ti, Fe, and Cu are detected (see the arrows of the graph). Thus,even when the measurement time is reduced from 60 seconds to 5 seconds,Ca, Ti, Fe, and Cu can be detected. That is, it can be considered thatdetection sensitivity was increased through the machine learning.

Meanwhile, in the analysis result based on the spectrum having themeasurement time of 5 seconds, V is detected. In the estimation resultbased on the spectrum having the measurement time of 5 seconds, V is notdetected (see the arrow of the graph). Further, in the analysis resultbased on the spectrum having the measurement time of 60 seconds, V isdetected. Thus, it can be considered that the learned estimation unitoverlooked the existence of V.

Table 1 is a table for showing a result of tabulation of thedetermination of whether or not the above-mentioned 20 elements existbased on the spectra acquired at the 117 measurement positions. In thiscase, when the quantitative value is equal to or larger than 1 cps, acorresponding element is determined to exist. In Table 1, the analysisresult and the estimation result based on the spectrum having themeasurement time of 5 seconds are compared with the analysis resultbased on the spectrum having the measurement time of 60 seconds.

As shown in Table 1, when the analysis result and the estimation resultbased on the spectrum having the measurement time of 5 seconds arecompared, the estimation result has higher sensitivity at 13 positionsthan the analysis result, and hence has a smaller number of overlookedelements by the 13 positions. Moreover, the estimation result has asmaller number of qualitative errors by 40 positions than the analysisresult.

TABLE 1 Result based on spectrum having measurement time of 5 secondsAnalysis result Estimation result Present Absent Present Absent Analysisresult Present 430 163 443 150 based on spectrum (742 having measurementpositions) time of 60 seconds Absent 94 1653 54 1693 (1,598 positions)

As described above, in order to determine whether or not thecontamination exists on the substrate, the peak fitting by the analysisunit 206 was required. However, the inventors have discovered thatwhether or not the contamination exists on the substrate can bedetermined without fitting to a spectrum acquired in a predeterminedenvironment by using the spectrum acquired in the predeterminedenvironment to execute learning.

That is, when an analysis target is a substrate having a flat surfacesuch as a silicon substrate, and a spectrum including peaks caused bythe elements contained in the contamination which adheres to the surfaceof this substrate is acquired through use of the total reflection X-rayfluorescence analysis, remarkable scattering of the fluorescent X-raysdoes not occur. In this case, it has been found that whether the peakincluded in the spectrum is caused by the element contained in thecontamination or noise can be determined by the learned estimation unit210 without employing the related-art method which uses the fitting.

Specifically, for example, it is possible to estimate a backgroundintensity at a peak position based on, for example, intensities beforeand after the peak position and a variation in the intensity caused bythe noise. As shown in FIG. 15(a), when the intensity at the peakposition is higher than the background intensity (that is, the spectrumrises upward), it can be determined that a peak exists.

Moreover, as shown in FIG. 15(b), there is a case in which whether ornot the intensity at the peak position is higher than the backgroundintensity cannot easily be determined. Even in this case, when thevariation in the intensity caused by the noise at the peak position islarger than the variation in the intensity caused by the noise atpositions before and after the peak position, it can be determined thata peak exists.

Further, when a specific element is contained, elements highly likely tocoexist with this specific element exist. For example, stainless steelis an alloy of Fe, Ni, and Cr, and is contamination highly likely toadhere to the substrate surface in production of, and in a processingstep for, the silicon substrate. When it is determined that a peakcaused by Fe is included in a spectrum, coexisting Ni and Cr are highlylikely to exist, and hence it can be determined that peaks caused Ni andCr are highly likely to exist.

Moreover, a plurality of fluorescent X-rays emitted from one elementexist. For example, as the fluorescent X-rays emitted from Fe, the Fe—Kαline and the Fe—Kβ line exist. Thus, when it is determined that a peakof the Fe—Kα line is included in the spectrum, it can be determined thata peak of the Fe—Kβ line is included.

As described above, the certain laws relating to whether or not a peakis included exist for the spectrum acquired in the above-mentionedenvironment, and hence the determination by the learning unit 208 can beachieved by using a large number of items of the teacher data to causethe learning unit 208 to learn.

Thus, the present invention is particularly effective in an environmentin which the total reflection X-ray fluorescence spectrometer 100 isinstalled in a clean room, an environment in which the output of theX-ray source 106 is controlled such that the output is constant, and anenvironment in which the temperature and the humidity in the measurementenvironment are controlled to be constant.

The present invention can be variously modified without being limited tothe above-mentioned Example. The configuration of the total reflectionX-ray fluorescence spectrometer 100 has been described as one example,and the present invention is not limited thereto. The configuration maybe replaced by a configuration that is substantially the same as theconfiguration described in the above-mentioned example, a configurationthat exhibits the same action and effect as those of the configurationdescribed in the above-mentioned example, or a configuration thatachieves the same object as that of the configuration described in theabove-mentioned example.

REFERENCE SIGNS LIST

100 total reflection X-ray fluorescence spectrometer, 104 sample stage,106 X-ray source, 108 monochromator, 110 detection unit, 116 sample, 202spectrum-for-learning acquisition unit, 204 spectrum-for-analysisacquisition unit, 206 analysis unit, 208 learning unit, 210 estimationunit, 212 parameter storage unit

The invention claimed is:
 1. A total reflection X-ray fluorescencespectrometer, comprising: a spectrum acquisition unit configured toacquire a first spectrum for learning and a second spectrum for learningrepresenting a relationship between intensities, and energies, ofemitted fluorescent X-rays by irradiating a surface of a substrate forteacher data acquisition with primary X-rays at a total reflectioncritical angle or less, and to acquire a spectrum for analysisrepresenting a relationship between intensities, and energies, ofemitted fluorescent X-rays by irradiating a surface of a substrate foranalysis with primary X-rays at a total reflection critical angle orless; an analysis unit configured to analyze an element contained incontamination based on the second spectrum for learning through use of afundamental parameter method or a calibration curve method; and alearning unit including an estimation unit which is configured togenerate estimation data on the element contained in the contaminationon the surface of the substrate for teacher data acquisition when thefirst spectrum for learning is input or estimation data on the elementcontained in the contamination on the surface of the substrate foranalysis when the spectrum for analysis is input, and for which learningby the estimation unit has been executed based on teacher data and theestimation data generated when the first spectrum for learning is inputto the estimation unit, wherein positions on the substrate for teacherdata acquisition irradiated with the primary X-rays when the firstspectrum for learning and the second spectrum for learning are acquiredare the same, wherein a time for acquiring the first spectrum forlearning and the spectrum for analysis is shorter than a time foracquiring the second spectrum for learning, and wherein the teacher datais data formed by combining the first spectrum for learning and ananalysis result based on the second spectrum for learning.
 2. (canceled)3. The total reflection X-ray fluorescence spectrometer according toclaim 1, wherein the estimation data is data indicating whether theelement contained in the contamination exists.
 4. The total reflectionX-ray fluorescence spectrometer according to claim 1, wherein theestimation data is data representing a quantitative value of the elementcontained in the contamination.
 5. The total reflection X-rayfluorescence spectrometer according to claim 1, wherein the substratefor teacher data acquisition and the substrate for analysis are each asilicon substrate, and wherein the element contained in thecontamination is a plurality of elements determined in advance.
 6. Anestimation method, comprising: a spectrum-for-learning acquisition stepof acquiring a first spectrum for learning and a second spectrum forlearning representing a relationship between intensities, and energies,of emitted fluorescent X-rays by irradiating a surface of a substratefor teacher data acquisition with primary X-rays at a total reflectioncritical angle or less; a learning step of executing learning for anestimation unit based on teacher data and estimation data generated whenthe first spectrum for learning is input to the estimation unit; aspectrum-for-analysis acquisition step of acquiring a spectrum foranalysis representing a relationship between intensities, and energies,of emitted fluorescent X-rays by irradiating a surface of a substratefor analysis for which whether an element contained in contaminationexists on the surface is unknown with primary X-rays at a totalreflection critical angle or less; and an estimation data generationstep of generating, using the estimation unit, the estimation data inresponse to input of the spectrum for analysis, wherein positions on thesubstrate for teacher data acquisition irradiated with the primaryX-rays when the first spectrum for learning and the second spectrum forlearning are acquired are the same, wherein a time for acquiring thefirst spectrum for learning and the spectrum for analysis is shorterthan a time for acquiring the second spectrum for learning, and whereinthe teacher data is data formed by combining the first spectrum forlearning and an analysis result based on the second spectrum forlearning.
 7. (canceled)
 8. The estimation method according to claim 6,wherein a plurality of items of the teacher data are acquired based onthe same measurement point of one substrate for teacher dataacquisition.